Publication Date



Open access

Embargo Period


Degree Type


Degree Name

Master of Science (MS)


Electrical and Computer Engineering (Engineering)

Date of Defense


First Committee Member

Onur Tigli

Second Committee Member

Ali Ghahremaninezhad

Third Committee Member

Mei-Ling Shyu


Developments in microfluidics have led a wide variety of research on MEMS-scaled biomedical applications. Many biomedical sensors, drug delivery systems, cell and protein syntheses devices, microfluidic switches have been successfully miniaturized. However, there is a need for controlled fluid transport for most of these biomedical devices. To address this need, micropump design has been a highly attractive research area for decades and various micropump design templates have been used for controlled fluid transfer. However, most of these developed micropumps are either: not small enough to combine with other microfluidic systems or require a large activation energy which does not make them suitable for biomedical applications. This thesis presents a fully biocompatible micropump system consisting of a new actuator membrane structure fabricated from a piezoelectric polymer: polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE). Its actuating performance was evaluated and compared with other common piezoelectric materials using finite element method (FEM) simulations. Full operation of actuator-membrane structures and diffuser elements which are the two components of the designed micropump were successfully proven separately and integration of these components was demonstrated.


Micropump; PVDF-TrFE; Diffuser; Nozzle; Actuator; Nanoliter